Abstract: The thermal cavitation of visco-elastoplastic material was analyzed theoretically. The mathematical model for void growth in an infinite visco-elastoplastic medium under thermal shock was built, taking into account the ideal incompressible plasticity with big deformation and viscoelasticity with small deformation. The technique of integration was adopted to obtain analytic solutions to void growth. And the nonlinear evolution equation of the moving interface was derived. Numerical examples were presented to analyze the influence of thermal shock temperature, heating rate and viscosity on the moving interface and void growth. Moreover, the critical temperature of thermal cavitation was obtained.