Abstract: A microfluidic driving structure and its method of micro valve based on hydraulic drive were proposed.The valve uses piezoelectric ceramics(Pzt)as power and PWM as real-time switch and the driving structure consists of main pump chamber and several hydraulic micro valves.All of valves were switched at a high speed to drive the liquid flow dynamically.The units have advantages of small,accurate and easy to be integrated into microfluidic chips,which can be used in uTAS systems,POCT miniaturization equipment and other aspects.