Abstract: For the automation, flexible, high accuracy and speed features of non-silicon MEMS devices micro-assembly, a micro-vision system design method was proposed and implemented based on metal oxide semiconductor chip(CMOS), field programmable gate array(FPGA) and digital signal processor(DSP). Some key system indicators were taken into account, including modular, flexible and reconfigurable, high detection accuracy and speed, made the micro-vision system have modular structure, function reconfigurable, a very high detection accuracy and speed. Through experiment, the physical resolution of the system was analyzed and the measurement accuracy of system was calibrated, the design technical indicators of the system were verified. The results show that the highest accuracy of the system can reach 0.6 μm and detection time is less than 0.65 seconds. The micro-vision system provides important solutions for precision, high speed testing of micro and small parts.